These are pressure transmitters developed for semiconductor industry, in which pressures are converted into electric signals and transmitted by the sensing portion equipped with evaporation coating type semiconductor strain gauge and a built-in electronic circuit. We provide two types of pressure transducers with UC / EP Grade for high-purity gas and BA / GP Grade achieved the cost down of gas piping without impairing the airtightness.
Feature
・Highly corrosion-resistant pressure sensors made of Co-Ni alloy or SUS316L are welded directly to the fitting, giving them excellent corrosion resistance, air-tightness, long-term stability, and reliability.
＊Please confirm that the gas contact part material is suitable for the gas to be measured.
・Few dead zone, where gas stagnates, exists.
・The pressure range of Gauge, Compound and Absolute were completed.
(For the absolute pressure range, please refer to separate catalogs.)