The ZT15 is a pressure transmitter built to accommodate a 1.5 surface mounting interface for semiconductor manufacturing gas distribution and can be applied to the gas panel and the valve manifold boxes, etc. We provide two types of pressure transducers with UC/EP Grade for high-purity gas and GP Grade achieved the cost down of gas piping without impairing the airtightness.
Feature
・It is possible to install the transmitter on a 1.5 surface mounting interface.
・Highly corrosion-resistant pressure sensors made of Co-Ni alloy or SUS316L are welded directly to the SUS316L joints, giving them excellent corrosion resistance, air-tightness, long-term stability, and reliability.
＊Please confirm that the gas contact part material is suitable for the gas to be measured.
・Very few“dead-zone”of stagnant gas.