Adoption double filter
In addition to the numeric filter, the adoption of mechanical filter (double filter), you can always measured in the best of conditions so that the highest of accuracy is obtained.
Automatic measurement stage
Achieve alignment prompt position by aligning the mouse to the measurement position. Also, if you enter the measurement position, it can also be a continuous automatic measurement. Coordinate correction, corresponding to various patterns by the channel link. Standard plate calibration is also possible automatic measurement.
Enhanced reporting features
By MS-Windows software adoption, easily it can capture measurement screen, report writing function is enhanced. Other processes including reporting even during the measurement in a multi-task function became possible.
Collimator five internal organs
Minimum of collimator can be very measurement of very small part in 0.1φmm.Standard-0.1,0.2,0.5,1.0,2.0
was further prepared two kinds of special specifications options.
0.05,0.1,0.2,0.3,0.5 ·
· 0.05 × 0.5,0.5 × 0.05,0.1,0.2,0.5
Self-diagnostic function and the X-ray tube maintenance function
The self-diagnosis function, and promptly deal with the equipment trouble solved. In addition, it supports the maintenance safety by adding the use of time and endurance time display function of the X-ray tube.
Spectrum display in the film thickness measurement
By spectral analysis high-speed processing by the multi-channel, run the spectrum display of the measured object by a simple operation. (Processing speed of about 2 to 3 seconds)
Display of the measurement section monitor image
Captures the X-ray irradiation unit in the Windows screen, display the X-ray irradiation unit. By the collimator, realize the magnification change function of the size of the change.
Display plating adhesion distribution of the measurement object in the visual
Plating thickness distribution of the measured object by a three-dimensional graph display you will see at a glance.
Be window X-ray tube (optional) by the performance improvement in the (high precision)
This time, the fluorescent X Senshikimaku thickness meter EX-731 will be available Be window X-ray tube (optional) beneath. By using this option, Cr measurement, and greatly improved repeat measurement accuracy in the Ni measurement.
Discussion of performance improvement
Sn measurement of high energy (high atomic number), which is the traditional equivalent, in the case of low energy of Cr and Ni (low atomic number) measurement, but more to the film thickness, Cr at least three times, in the Ni accuracy repeated two more times has been improved. In the case of the surface layer Au in the two-layer measurement, only Kan, intermediate layer Ni has been improved by about 20% in response to the contribution of improved accuracy. Apply For film thickness meter of the fluorescent X-ray method, repeated measurement precision (standard deviation) is due to statistical fluctuation in occur the process of the fluorescent X-ray intensity is obtained, Be window X-ray tube (optional) by, in the case of Cr, it shows that the fluorescent X-ray intensity of at least about 9 times compared with the conventional standard machine is obtained. Therefore, the measurement of conventional equal accuracy, will be possible in a short period of time. By all means, please consider the adoption of this Be window X-ray tube.